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95 Legacy low idle speed

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My 95 2.2 is idling a little slow lately. I've cleaned the IACV and TB,as best I can, without change. No stalling or hesitation, but I'd like the RPM's up a little. Could it be plug wires (originals AFAIK) or MAF?? Thanks.

Doubtful, Check out the CTS and TPS.

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Don't have a tach; it never stalls, but it's slow enough that the Subaru idle shake is more pronounced than it was before.

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